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| Name︰ | High pure synthetic quartz coated crucible |
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| specifications︰ | 半导体用透明石英玻璃坩埚规格尺寸
Size of transparent quartz glass crucibles for semiconductor
(分圆底和平底两种 With round and flat bottoms) mm
外直径
Outside dia(D) 高度
Height(H) 底部半径
Radius ofbottom(R) 厚度
Thickness(S) 同横截面的厚度公差
Wall thickness tolerance at the same section
80±0.50.8
60±2 D-1/2 2.0±0.5 0.3
90±0.50.8
70±2 D-1/2 2.0±0.5 0.3
100±0.51.0 80±3 D-1/2 2.3±0.5 0.3
106±0.51.0 90±3 D-1/2 2.3±0.5 0.3
114±0.51.0 75±3 D-1/2 2.3±0.5 0.3
130±0.51.0 110±3 D-1/2 2.5±0.5 0.4
134±0.51.0 110±3 D-1/2 2.5±0.5 0.4
153±0.52.0 153±3 D-1/2 3.0±0.5 0.4
178±0.55 178±3 D-1/2 3.0±0.5 0.4
203±0.55 203±3 D-1/2 3.0±0.5 0.4
Coating weight：
For quartz glass crucibles：according to plant standard，coating weight inside crucible on every lOOcm2 no less than 1.44g， if users require more coating， coating Weight may be increased．
For quartz glass wares(including boats and diffusion tubes etc)： coating weight of their inner surface is≥1g／100cm2．
Other coatings and Durified products：
Purlfied products：during diffusion inside tubes of semiconductor products and producing gallium arsenide monocrystal the diffusion of impurity ions inside wares causes pollution．In order to avoid pollotion our company has used the technology of purlfying quartz glass wares With hydrogen chloride under high temperature，as a result， the content of heavy metal impurities greatly decreased in purified products．When this kind of products was used for inside diffusion of silicon plate， the life of ions of current carrier prolonged twice and more．
AL2O3 and SiC coating products：In order to increase temperature of used (softened deformation) temperature for diffuser，coat a layer of high purity AL2O3 on the outer surface Of diffuser and sinter it， the deformation ratio of coated products under 1300℃ will reduce by 60％ in comparing with the no coated products， when coat SiCby 80％． Besides of incresing used temperature of quartz glass tubes the outer surface coating can also prevent from foreign impurity ions permeating into inner wall of quartz glass tube and guarantee the quality Of silicon plats．
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| Advantages︰ | Now there are 2 sorts quartz glass products for semiconductors in China according to purity：molten from nature crystal，impurity contents(Al、Fe、Ca、Mg、Ti、Ni、Cu、Co、Mn、B、K、Na、Li etc)<50ppm，and molten through high temperature hydrolysis from high pure tetrachlosilane，impurity of these metals<2ppm，but this product is very expertsive，besides soft point is 80℃ lower than that of quartz glass made from rock crystal，and the Crucible，diffusion tube made from it become deformed in use．our company using low cost，high soft point of quartz products and high purity of synthetic quartz，has produced the high purity synthetic quartz coating quartz glass products，the technology is putting a layer of high pure synthetic quartz glass into the internal wall Of crystal quartz glass through high temperature spray coating． Thus we have the advantages of both quartz glass products．
化学纯度chemical purity：
元素含量
项 目
A1铝 Fe铁 Ca钙 Mg镁 Ti钛 Ni镍 Cu铜 K钾 Na钠 Mn锰 Cr铬 Li锂 B硼 杂质总量
tolal imputities
玻璃本体
for glass 17 1.7 3．4 1．2 1．3 <0.3 0.5 1.94 2.88 0.25 <3.0 0.1 0.25 24.85
涂层部份
for coating 0.37 0.3l 0.27 0.04 0.03 <0.03 0.0l 0.5 0.5 <0.03 <0.03 <0.03 0.02 1.22
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